Abstract: This project deals with the quasi static analysis of coplanar waveguide using conformal mapping technique and the resulting parameter are used for the design of RF MEMS filter. The electromagnetic model obtained from the conformal mapping technique is used to analyse various CPW structures and interdigitated coplanar waveguide structures. By using Conventional Coplanar Waveguide (CPW) RF MEMS filter is designed. CPW on silicon is used for RF MEMS filter design. By varying the height of the bridge, various simulations are noted. The change in thickness of the bridge varies the cut off frequency of the filter. Similarly RF MEMS filter is designed using interdigitated coplanar wave guide. Simulations results were compared for both CPW and Interdigitated CPW.

Keywords: ADS Tool, RF MEMS, CPW.